Turbo Molecular Pump , F-400/4500 , Large pumping speed, Water cooling , Oil lubrication
KYKY developed the newest oil lubrication turbo pumps of convenient operation, flexible installation, wide application range and stable performance. pumping capacity is 4500 L/s ( N2).
Specifications:
| Flange(In) |
DN400 ISO-K |
Gas Throughout (sccm) |
N2:5500 |
| Flange(Out) KF |
DN100 |
He:4000 |
| Pumping Speed( L/s) |
N2:4500 |
H2:3200 |
| He:3200 |
Ar:2100 |
| H2:2000 |
Rotation Speed ( rpm) |
15300 |
| Ar:4200 |
Run-Up Time(min) |
≤10 |
| Compression Ratio |
N2:5*107 |
Cooling Type,Standard |
Water |
| He:103 |
Cooling Water Consumption ( L/min) |
≥1 |
| H2:5*102 |
Cooling Water Temperature(℃) |
≤25 |
| Ar:5*107 |
Power Connection:Voltage (V AC) |
DC24/AC220 |
| Ultimated Pressure(Pa) |
≤2×10-6 |
Max.Power Consumption (W) |
≤1100 |
| Max. Continuous Fore-vacuum pressure(Pa) |
100 |
Controller Model |
FD-III |
| Max. Fore-vacuum Pressure |
N2:300 |
Backing pump |
30L/s
|
Advantages:
This series of pump is good at performance under harsh environmental (high temperature, dust, etc.), stable in performance and with long service life, and simple maintenance and convenient operation as well.
Applications:
Main applications are in industrial leak detection, PVD, CVD, ion implantation, vacuum electronic components manufacturing, low-E glass, ITO glass, optical coating, solar cells, electron beam welding, vacuum furnace and other industries
KYKY TECHNOLOGY CO., LTD. has many years of experiences in R & D and manufacturing of vacuum generation products, including series molecular pumps, series molecular pump stations, series ion pumps, series gate valves and supporting controllers.
Since developing the first vertical turbo molecular pump in 1970’s, KYKY always orients
to the demand-driven market, aims to meet the requirement of our customers, and continuously launches new products in the enterprise spirit of developing on innovation.
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